High vacuum evaporation Product parameter

Vacuum evaporation coating equipment PD-400S

The equipment can provide high-quality thin film samples for material research and analysis, which can be used in various characterization

Product parameter

• Cavity size: 304 stainless steel chamber, 400×400×450mm；;

• Equipment size l× w× h: 950× 780× 1900 mm;

• Vacuum limit: better than 2.0× 10-5pa;

• Pumping speed: pumping from the atmosphere to 5.0× 10-4pa ≤ 20min;

• Holding pressure: 12H≤5Pa;

• Substrate table: ≤ ≤150mm×150mm；;

• Evaporation source and power supply: 4-8 groups of evaporation sources (organic and metal);

• Non-uniformity of film thickness: better than 3% ~ 5%;

• Repeatability: better than 3% ~ 5%;

• Automatic control of evaporation source output, optional co-evaporation preparation process;

• Can be docked with the glove box;