The system PD-600C using confocal sputtering or public rotation structure can be selected, workpiece size 4-6 inches. Four 3-inch pieces can be configured.Support customized system.
The system PD-550CS series magnetron sputtering coating equipment is equipped with a number of circular plane targets or rectangular plane targets, using DC, DC pulse, RF power supply,substrate size up to 300mm,integrated glovebox