250x250mm Magnetron Sputtering Coating Machine with Golvebox PD-550CS

   Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services. 

Equipment Features:

★ The front door of the sputtering equipment is embedded in the glove box, the current door slides open, and the evaporation equipment studio and the glove box operation room are integrated, so there is no need to transfer the test sample with the help of transfer tools or air breaking;

★ The sputtering chamber is made of SUS 304 stainless steel material, and the surface of the chamber including the shielding plate is all mirror polished, which can obtain a clean working environment and good vacuum degree;

★ Vacuum obtained by using large pumping speed molecular pump + direct rotary vane pump (built-in anti-return oil check valve) quasi-oil-free vacuum system, the main pump using 1200L/s pumping speed compound molecular pump, standard side pumping structure, can keep the main pump open the vacuum chamber;

★ Sputtering chamber vacuum limit is better than 2.0×10-5Pa, 1 ~ 2h can be pumped to 9.9×10-5Pa;

★ Sputtering target "product" shape can be equipped with 2-3 inches (2-3 targets) equipped with independent baffles;

★ Sputtering power supply; 2-3 sets (DC, RF optional);

★ The system can be selected with low pressure sputtering technology to prepare dense film and small damage to the base.

★ Control system: Siemens PLC+ touch screen, program interlock, anti-misoperation, easy to learn.

★ Support Substrate size of 250x250mm,rectangular target 450x75 2pcs

Technical Support & Service

1.Technical support: Before the contract is signed, our professional engineers will make the best selection and program design for customers under the premise of fully understanding customer needs, so that customers fully understand and understand product technical indicators, performance purposes, use occasions, safety precautions, etc., to help customers make the right choice.

2.Installation and training: Before the product is used, we will send professional engineers to provide you with on-site technical support, training and demonstration services.

3.Product warranty: We provide a 12-month warranty period for the product. During the warranty period, the company is responsible for compensation or free repair of equipment or accessories damage. (Except consumables and consumable parts)

4.Lifelong maintenance: We provide lifelong service to the products, for more than the warranty period of repair, maintenance only charge material fees, exempt from all labor costs.

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