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Magnetron Sputtering Coating Machine PD-300C

The system PD-300C is a small multi-target magnetron sputtering coating test platform developed by our company for laboratory applications. The system covers an area of small, easy to operate

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  • PD-300C

  • PUDI

  • 8419899090-8


   Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services. 

For Magnetrn Sputtering Coater,the typical models including:

ModelPD-200CPD-300CPD-400CPD-500CPD-600CPD-450CSPD-550CS
ApplicationWidely used in scientific research institutes and laboratories to prepare metal electrode layers, sample preparation for scanning electron microscopy, and research on new organic materials and new processes related to new energy materials. It is used in the research and development of perovskite solar cells, OLED, lithium batteries, quantum dot LED, OPV and other industries, and can prepare ITO oxide, nitride, metal and other thin film materials. At the same time, it is also suitable for multi-material research such as metals, semiconductors, nanotechnology and insulators.
MaterialsMetal materials such as aluminum, titanium, zirconium, chromium, nickel, iron, etc. Oxide materials such as alumina, silicon oxide, titanium oxide Semiconductor materials: such as silicon, germanium, etc.
Device Size (L×W×H)500×500×600mm550×900×1850mm850×1500×1900mm1450×1250×1850mm2200×1700×2200mm1500×850×1900mm1500×850×1900mm
chamber Size(L×W×H)Φ220×H340mm    Cylindrical300×300×380mm400×400×380mm500×500×500mm600×600×500mm440×440×450mm500×440×450mm
Ultimate Vacuum6×10-5Pa7×10-5Pa3×10-5Pa3×10-5Pa3×10-7Pa5×10-5Pa5×10-5Pa
Pumping speed6×10-4Pa≤20min8×10-4Pa≤35min8×10-4Pa≤30min8×10-4Pa≤35min5×10-6Pa≤30min9×10-4Pa≤35min9×10-4Pa≤35min
Keep pressure12H≤8pa12H≤8pa12H≤8pa12H≤5pa12H≤5pa12H≤5pa12H≤5pa
  UnifimityBetter than ±5%
Sputter target gun2-3inch target gun 1pc2-3inch target gun 2pcs2-3inch target gun 3pcs2-3 inch target gun 4pcs2-3 inch target gun 4pcsRectangular targets  L365mm x W75mm 2pcsRectangular targets  L450mm x W75mm 2pcs
Substrate Size2-3INCH2-4INCH2-4INCH2-6INCH2-6INCH200×200mm250×250mm
Control systemSiemens PLC + PC automatic control; the speed and final thickness can be input, and PID adjustment automatically controls the evaporation power output.

 More About PUDI VACUUM PD-300C

NameMagnetron Sputtering Coating Equipment PD-300C
Limiting vacuumBetter than 3 x 10 Pa-5 (after baking and degassing).
Pumping speed testLess than 30 min from the atmosphere to the working vacuum (5×10-4 Pa).
System leakage rate≤2x10-7 Pa.l/S(evaluated by helium mass spectrometer leak detector test index).
System pressure preservationAfter the system is pumped to high vacuum, the pump is shut down and the vacuum is less than 10 Pa after 12 hours of pressure preservation.
Sputter the target gunCan be equipped with 2 2-inch target guns or 2 3-inch target guns.
Substrate maximum heating temperature 500℃, room temperature to 200℃ accuracy :±3°C, 300℃ to 500℃ accuracy :±1.5°C; Negative bias -800 V can be added to the sample table.
Substrate heatingSubstrate substrate up to 4 inches, compatible with 4 inches, 2 inches, Φ45 mm, Φ30 mm, and small size.
Sputter sizesquare pieces (less than 45 mm diagonal length). Substrate rotation speed: Continuously adjustable from 5 to 25 rpm.
Film forming qualityUniformity is better than ±4% within the 3-inch range of the tray.
ManufacturerPUDI VACUUM

Contact Us

Manufacturer Full NameWUHAN PUDI VACUUM TECHNOLOGY CO.,LTD
Organisational Credit Number VA91420100MA4KN2CF2B
Email:helen@pdvacuum.com ;   zyw@pdvacuum.com
Tel:0086 27 81293223  
WECHAT/WHATSAPP:0086 13129990512


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CONTACT US

Add : #18-1, Donghu High-tech Industrial Innovation Base, No.9, Miaoshan Avenue, Jiangxia District, Wuhan city,China
Phone : +86-131-2999-0512
E-mail :  helen@pdvacuum.com
Skype : etangfei
PUDI VACUUM 

CONTACT US

    Add : #18-1, Donghu High-tech Industrial Innovation Base, No.9, Miaoshan 
    Phone : +86-131-2999-0512
       Wechat/Whatsapp:0086 13129990512
    E-mail : helen@pdvacuum.com
    Skype : etangfei
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