The system PD-300C is a small multi-target magnetron sputtering coating test platform developed by our company for laboratory applications. The system covers an area of small, easy to operate
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PD-300C
PUDI
8419899090-8
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Magnetrn Sputtering Coater,the typical models including:
Model | PD-200C | PD-300C | PD-400C | PD-500C | PD-600C | PD-450CS | PD-550CS |
Application | Widely used in scientific research institutes and laboratories to prepare metal electrode layers, sample preparation for scanning electron microscopy, and research on new organic materials and new processes related to new energy materials. It is used in the research and development of perovskite solar cells, OLED, lithium batteries, quantum dot LED, OPV and other industries, and can prepare ITO oxide, nitride, metal and other thin film materials. At the same time, it is also suitable for multi-material research such as metals, semiconductors, nanotechnology and insulators. | ||||||
Materials | Metal materials such as aluminum, titanium, zirconium, chromium, nickel, iron, etc. Oxide materials such as alumina, silicon oxide, titanium oxide Semiconductor materials: such as silicon, germanium, etc. | ||||||
Device Size (L×W×H) | 500×500×600mm | 550×900×1850mm | 850×1500×1900mm | 1450×1250×1850mm | 2200×1700×2200mm | 1500×850×1900mm | 1500×850×1900mm |
chamber Size(L×W×H) | Φ220×H340mm Cylindrical | 300×300×380mm | 400×400×380mm | 500×500×500mm | 600×600×500mm | 440×440×450mm | 500×440×450mm |
Ultimate Vacuum | 6×10-5Pa | 7×10-5Pa | 3×10-5Pa | 3×10-5Pa | 3×10-7Pa | 5×10-5Pa | 5×10-5Pa |
Pumping speed | 6×10-4Pa≤20min | 8×10-4Pa≤35min | 8×10-4Pa≤30min | 8×10-4Pa≤35min | 5×10-6Pa≤30min | 9×10-4Pa≤35min | 9×10-4Pa≤35min |
Keep pressure | 12H≤8pa | 12H≤8pa | 12H≤8pa | 12H≤5pa | 12H≤5pa | 12H≤5pa | 12H≤5pa |
Unifimity | Better than ±5% | ||||||
Sputter target gun | 2-3inch target gun 1pc | 2-3inch target gun 2pcs | 2-3inch target gun 3pcs | 2-3 inch target gun 4pcs | 2-3 inch target gun 4pcs | Rectangular targets L365mm x W75mm 2pcs | Rectangular targets L450mm x W75mm 2pcs |
Substrate Size | 2-3INCH | 2-4INCH | 2-4INCH | 2-6INCH | 2-6INCH | 200×200mm | 250×250mm |
Control system | Siemens PLC + PC automatic control; the speed and final thickness can be input, and PID adjustment automatically controls the evaporation power output. |
More About PUDI VACUUM PD-300C
Name | Magnetron Sputtering Coating Equipment PD-300C |
Limiting vacuum | Better than 3 x 10 Pa-5 (after baking and degassing). |
Pumping speed test | Less than 30 min from the atmosphere to the working vacuum (5×10-4 Pa). |
System leakage rate | ≤2x10-7 Pa.l/S(evaluated by helium mass spectrometer leak detector test index). |
System pressure preservation | After the system is pumped to high vacuum, the pump is shut down and the vacuum is less than 10 Pa after 12 hours of pressure preservation. |
Sputter the target gun | Can be equipped with 2 2-inch target guns or 2 3-inch target guns. |
Substrate maximum heating temperature 500℃, room temperature to 200℃ accuracy :±3°C, 300℃ to 500℃ accuracy :±1.5°C; Negative bias -800 V can be added to the sample table. | |
Substrate heating | Substrate substrate up to 4 inches, compatible with 4 inches, 2 inches, Φ45 mm, Φ30 mm, and small size. |
Sputter size | square pieces (less than 45 mm diagonal length). Substrate rotation speed: Continuously adjustable from 5 to 25 rpm. |
Film forming quality | Uniformity is better than ±4% within the 3-inch range of the tray. |
Manufacturer | PUDI VACUUM |
Contact Us
Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
Organisational Credit Number | VA91420100MA4KN2CF2B |
Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
Tel: | 0086 27 81293223 |
WECHAT/WHATSAPP: | 0086 13129990512 |
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Magnetrn Sputtering Coater,the typical models including:
Model | PD-200C | PD-300C | PD-400C | PD-500C | PD-600C | PD-450CS | PD-550CS |
Application | Widely used in scientific research institutes and laboratories to prepare metal electrode layers, sample preparation for scanning electron microscopy, and research on new organic materials and new processes related to new energy materials. It is used in the research and development of perovskite solar cells, OLED, lithium batteries, quantum dot LED, OPV and other industries, and can prepare ITO oxide, nitride, metal and other thin film materials. At the same time, it is also suitable for multi-material research such as metals, semiconductors, nanotechnology and insulators. | ||||||
Materials | Metal materials such as aluminum, titanium, zirconium, chromium, nickel, iron, etc. Oxide materials such as alumina, silicon oxide, titanium oxide Semiconductor materials: such as silicon, germanium, etc. | ||||||
Device Size (L×W×H) | 500×500×600mm | 550×900×1850mm | 850×1500×1900mm | 1450×1250×1850mm | 2200×1700×2200mm | 1500×850×1900mm | 1500×850×1900mm |
chamber Size(L×W×H) | Φ220×H340mm Cylindrical | 300×300×380mm | 400×400×380mm | 500×500×500mm | 600×600×500mm | 440×440×450mm | 500×440×450mm |
Ultimate Vacuum | 6×10-5Pa | 7×10-5Pa | 3×10-5Pa | 3×10-5Pa | 3×10-7Pa | 5×10-5Pa | 5×10-5Pa |
Pumping speed | 6×10-4Pa≤20min | 8×10-4Pa≤35min | 8×10-4Pa≤30min | 8×10-4Pa≤35min | 5×10-6Pa≤30min | 9×10-4Pa≤35min | 9×10-4Pa≤35min |
Keep pressure | 12H≤8pa | 12H≤8pa | 12H≤8pa | 12H≤5pa | 12H≤5pa | 12H≤5pa | 12H≤5pa |
Unifimity | Better than ±5% | ||||||
Sputter target gun | 2-3inch target gun 1pc | 2-3inch target gun 2pcs | 2-3inch target gun 3pcs | 2-3 inch target gun 4pcs | 2-3 inch target gun 4pcs | Rectangular targets L365mm x W75mm 2pcs | Rectangular targets L450mm x W75mm 2pcs |
Substrate Size | 2-3INCH | 2-4INCH | 2-4INCH | 2-6INCH | 2-6INCH | 200×200mm | 250×250mm |
Control system | Siemens PLC + PC automatic control; the speed and final thickness can be input, and PID adjustment automatically controls the evaporation power output. |
More About PUDI VACUUM PD-300C
Name | Magnetron Sputtering Coating Equipment PD-300C |
Limiting vacuum | Better than 3 x 10 Pa-5 (after baking and degassing). |
Pumping speed test | Less than 30 min from the atmosphere to the working vacuum (5×10-4 Pa). |
System leakage rate | ≤2x10-7 Pa.l/S(evaluated by helium mass spectrometer leak detector test index). |
System pressure preservation | After the system is pumped to high vacuum, the pump is shut down and the vacuum is less than 10 Pa after 12 hours of pressure preservation. |
Sputter the target gun | Can be equipped with 2 2-inch target guns or 2 3-inch target guns. |
Substrate maximum heating temperature 500℃, room temperature to 200℃ accuracy :±3°C, 300℃ to 500℃ accuracy :±1.5°C; Negative bias -800 V can be added to the sample table. | |
Substrate heating | Substrate substrate up to 4 inches, compatible with 4 inches, 2 inches, Φ45 mm, Φ30 mm, and small size. |
Sputter size | square pieces (less than 45 mm diagonal length). Substrate rotation speed: Continuously adjustable from 5 to 25 rpm. |
Film forming quality | Uniformity is better than ±4% within the 3-inch range of the tray. |
Manufacturer | PUDI VACUUM |
Contact Us
Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
Organisational Credit Number | VA91420100MA4KN2CF2B |
Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
Tel: | 0086 27 81293223 |
WECHAT/WHATSAPP: | 0086 13129990512 |