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PD-400
PUDI
8419899090-5
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Thermal Evaporation Coater,the typical models including:
| MODEL | PD-200 | PD-300 | PD-400 | PD-400S | PD-450S | PD-500S | PD-800S |
| Application | It is widely used in the fields of education and scientific research, including metal electrode layer preparation and new energy material research. The same applies to early experiments in corporate new product development. In scientific research institutes and laboratories, it is often used for evaporation electrodes, scanning electron microscope sample preparation, and research on OLEDs and solar cells. | ||||||
| Materials | Metal and organic thin film materials | Deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, and can expand the deposition of single-layer films, multi-layer films and mixed films. | Can be plated with gold, silver, titanium, chromium, molybdenum SiO2/ITO/AZO/nickel oxide and other materials. | ||||
| Device Size （L×W×H ) | 500×360×420mm | 500×750×1800mm | 850×1500×900mm | 950×780×1900mm | 950×830×1900mm | 1200×950×2000mm | 1850×870×2100mm |
| Chamber Size | Φ260×H310mm Cylindrical | 300×300×400mm | 350× 350×450mm | 400×400×460mm | 450×400×550mm | 500×500×500mm | 800×700×700mm |
| (L×W×H) | |||||||
| Ultimate Vacuum | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 2×10-5Pa | Less than 2×10-5Pa | Less than 3×10-5Pa | Less than 3×10-5Pa |
| Pumping speed | 5×10-4≤30min | 9×10-4≤40min | 8×10-4≤30min | 5×10-4≤20min | 5×10-4≤20min 12H≤5pa | 5×10-4≤25min 12H≤5pa | 2×10-3≤30min 12H≤5pa |
| Keep pressure | 12H≤10pa | 12H≤10pa | 12H≤10pa | 12H≤5pa | |||
| Unifimity | Film Thickness Unifimity≤ ±5%，Repeatability ≤ ± 5% | ||||||
| Substrate Size | 80mm×80mm | 100mm×100mm | 150mm×150mm | 150mm×150mm | 200mm×200mm | 200mm×200mm | 350mm×350mm |
| Evaporation Sources | 1 or 2-Pocket | 2 or 3-Pocket | 4 or 6-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket |
| System Control | Siemens Touch Screen Automatic PLC control and manual operation;System monitoring,alarm and process menu editing;Process menu can be set accordingly to the preset work step mode;Real time data record;Alarm and safty control | ||||||
The system adopts large pumping speed molecular pump oil free high vacuum system, vacuum mechatronics design, covers a small area (length × width: 550×900 mm) save laboratory space, metal evaporation source and organic evaporation source can be compatible, cost-effective, easy to operate. Widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.
Typical Technical Specifications about PD-400
| Vacuum chamber | Vacuum special 304 stainless steel |
| chamber size is about 350*350*H450mm, square stainless steel chamber, integrated layout, front door can be | |
| opened, easy to change wire and loading. | |
| Vacuum system | Molecular pump +6 L/S direct-coupled Rotary vane pump vacuum system, pneumatic valve, vacuum gauge. |
| Vacuum limit | Better than 5.0 × 10-5 Pa; Leakage rate: better than 5×10－ 8 Pa·M3/S (national standard). |
| Pumping Speed | Atmospheric pressure ~5 × 10-4 Pa less than 30 min. |
| Substrate table | Maximum plating substrate size/area: 120 mm x 120 mm; Sample can be rotated heating and electric lifting, sample table with independent baffle; Sample table can be heated, heating temperature 0-300℃ temperature control accuracy ± 1℃. The distance between substrate and evaporation source is adjustable, and the maximum range of motor lifting and lifting is adjustable from 380 to 280 mm. |
| Sample table rotation: sample plate table can be rotated, 0 ~ 30 RPM continuous adjustable. | |
| Evaporating power supply | With 2-4 groups of boat evaporation source, metal source using water-cooled copper electrode + evaporation boat structure; At the same time, it is equipped with 2-4 sets of organic evaporation beam source furnace. The radius of the source furnace is 0.5 to 0.7 cm, the height is 2 cm, about 3 ml. |
| Film thickness controller | Choose INFICON SQC310 film thickness meter set, automatic control of evaporation output, to achieve automatic coating. |
| Control mode | Siemens PLC+ touch screen manual Automatic control;Speed and final thickness can be input, PID adjustment automatically control the evaporation power output. |
| Manufacturer | PUDI VACUUM |
Contact Us
| Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
| Organisational Credit Number | VA91420100MA4KN2CF2B |
| Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
| Tel: | 0086 27 81293223 |
| WECHAT/WHATSAPP: | 0086 13129990512 |
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Thermal Evaporation Coater,the typical models including:
| MODEL | PD-200 | PD-300 | PD-400 | PD-400S | PD-450S | PD-500S | PD-800S |
| Application | It is widely used in the fields of education and scientific research, including metal electrode layer preparation and new energy material research. The same applies to early experiments in corporate new product development. In scientific research institutes and laboratories, it is often used for evaporation electrodes, scanning electron microscope sample preparation, and research on OLEDs and solar cells. | ||||||
| Materials | Metal and organic thin film materials | Deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, and can expand the deposition of single-layer films, multi-layer films and mixed films. | Can be plated with gold, silver, titanium, chromium, molybdenum SiO2/ITO/AZO/nickel oxide and other materials. | ||||
| Device Size （L×W×H ) | 500×360×420mm | 500×750×1800mm | 850×1500×900mm | 950×780×1900mm | 950×830×1900mm | 1200×950×2000mm | 1850×870×2100mm |
| Chamber Size | Φ260×H310mm Cylindrical | 300×300×400mm | 350× 350×450mm | 400×400×460mm | 450×400×550mm | 500×500×500mm | 800×700×700mm |
| (L×W×H) | |||||||
| Ultimate Vacuum | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 2×10-5Pa | Less than 2×10-5Pa | Less than 3×10-5Pa | Less than 3×10-5Pa |
| Pumping speed | 5×10-4≤30min | 9×10-4≤40min | 8×10-4≤30min | 5×10-4≤20min | 5×10-4≤20min 12H≤5pa | 5×10-4≤25min 12H≤5pa | 2×10-3≤30min 12H≤5pa |
| Keep pressure | 12H≤10pa | 12H≤10pa | 12H≤10pa | 12H≤5pa | |||
| Unifimity | Film Thickness Unifimity≤ ±5%，Repeatability ≤ ± 5% | ||||||
| Substrate Size | 80mm×80mm | 100mm×100mm | 150mm×150mm | 150mm×150mm | 200mm×200mm | 200mm×200mm | 350mm×350mm |
| Evaporation Sources | 1 or 2-Pocket | 2 or 3-Pocket | 4 or 6-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket |
| System Control | Siemens Touch Screen Automatic PLC control and manual operation;System monitoring,alarm and process menu editing;Process menu can be set accordingly to the preset work step mode;Real time data record;Alarm and safty control | ||||||
The system adopts large pumping speed molecular pump oil free high vacuum system, vacuum mechatronics design, covers a small area (length × width: 550×900 mm) save laboratory space, metal evaporation source and organic evaporation source can be compatible, cost-effective, easy to operate. Widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.
Typical Technical Specifications about PD-400
| Vacuum chamber | Vacuum special 304 stainless steel |
| chamber size is about 350*350*H450mm, square stainless steel chamber, integrated layout, front door can be | |
| opened, easy to change wire and loading. | |
| Vacuum system | Molecular pump +6 L/S direct-coupled Rotary vane pump vacuum system, pneumatic valve, vacuum gauge. |
| Vacuum limit | Better than 5.0 × 10-5 Pa; Leakage rate: better than 5×10－ 8 Pa·M3/S (national standard). |
| Pumping Speed | Atmospheric pressure ~5 × 10-4 Pa less than 30 min. |
| Substrate table | Maximum plating substrate size/area: 120 mm x 120 mm; Sample can be rotated heating and electric lifting, sample table with independent baffle; Sample table can be heated, heating temperature 0-300℃ temperature control accuracy ± 1℃. The distance between substrate and evaporation source is adjustable, and the maximum range of motor lifting and lifting is adjustable from 380 to 280 mm. |
| Sample table rotation: sample plate table can be rotated, 0 ~ 30 RPM continuous adjustable. | |
| Evaporating power supply | With 2-4 groups of boat evaporation source, metal source using water-cooled copper electrode + evaporation boat structure; At the same time, it is equipped with 2-4 sets of organic evaporation beam source furnace. The radius of the source furnace is 0.5 to 0.7 cm, the height is 2 cm, about 3 ml. |
| Film thickness controller | Choose INFICON SQC310 film thickness meter set, automatic control of evaporation output, to achieve automatic coating. |
| Control mode | Siemens PLC+ touch screen manual Automatic control;Speed and final thickness can be input, PID adjustment automatically control the evaporation power output. |
| Manufacturer | PUDI VACUUM |
Contact Us
| Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
| Organisational Credit Number | VA91420100MA4KN2CF2B |
| Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
| Tel: | 0086 27 81293223 |
| WECHAT/WHATSAPP: | 0086 13129990512 |
