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PD-400S
PUDI
8419899090-5.5
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Thermal Evaporation Coater,the typical models including:
| MODEL | PD-200 | PD-300 | PD-400 | PD-400S | PD-450S | PD-500S | PD-800S |
| Application | It is widely used in the fields of education and scientific research, including metal electrode layer preparation and new energy material research. The same applies to early experiments in corporate new product development. In scientific research institutes and laboratories, it is often used for evaporation electrodes, scanning electron microscope sample preparation, and research on OLEDs and solar cells. | ||||||
| Materials | Metal and organic thin film materials | Deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, and can expand the deposition of single-layer films, multi-layer films and mixed films. | Can be plated with gold, silver, titanium, chromium, molybdenum SiO2/ITO/AZO/nickel oxide and other materials. | ||||
| Device Size （L×W×H ) | 500×360×420mm | 500×750×1800mm | 850×1500×900mm | 950×780×1900mm | 950×830×1900mm | 1200×950×2000mm | 1850×870×2100mm |
| Chamber Size | Φ260×H310mm Cylindrical | 300×300×400mm | 350× 350×450mm | 400×400×460mm | 450×400×550mm | 500×500×500mm | 800×700×700mm |
| (L×W×H) | |||||||
| Ultimate Vacuum | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 2×10-5Pa | Less than 2×10-5Pa | Less than 3×10-5Pa | Less than 3×10-5Pa |
| Pumping speed | 5×10-4≤30min | 9×10-4≤40min | 8×10-4≤30min | 5×10-4≤20min | 5×10-4≤20min 12H≤5pa | 5×10-4≤25min 12H≤5pa | 2×10-3≤30min 12H≤5pa |
| Keep pressure | 12H≤10pa | 12H≤10pa | 12H≤10pa | 12H≤5pa | |||
| Unifimity | Film Thickness Unifimity≤ ±5%，Repeatability ≤ ± 5% | ||||||
| Substrate Size | 80mm×80mm | 100mm×100mm | 150mm×150mm | 150mm×150mm | 200mm×200mm | 200mm×200mm | 350mm×350mm |
| Evaporation Sources | 1 or 2-Pocket | 2 or 3-Pocket | 4 or 6-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket |
| System Control | Siemens Touch Screen Automatic PLC control and manual operation;System monitoring,alarm and process menu editing;Process menu can be set accordingly to the preset work step mode;Real time data record;Alarm and safty control | ||||||
The system adopts large pumping speed molecular pump oil free high vacuum system, vacuum mechatronics design, covers a small area (length × width: 550×900 mm) save laboratory space, metal evaporation source and organic evaporation source can be compatible, cost-effective, easy to operate. Widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.
Typical Technical Specifications about PD-400S
Equipment features:
★ Front and back door to ensure sealing, front sliding door operation light, pneumatic automatic lock; When the rear door is loaded/repaired, the atmosphere will not enter the glove box environment. When the rear door is closed, it can be tightly sealed by the handle lock directly.
★ The equipment adopts anti-turbulence design to prevent dust and improve the quality of film layer.
★ Temperature-controlled organic evaporation source adopts
temperature-controlled beam source furnace structure baffle integrated design to ensure that organic materials are not polluted, not only the Angle is adjustable, the uniformity is good, but also through the imported film thickness instrument linkage control to achieve accurate rate control, doping and so on;
★ The equipment is compatible with organic/inorganic evaporation, multi-component co-evaporation composite film/sub-evaporation to obtain multi-layer film
★ The collocation and number of evaporation source can be selected according to the user's time needs, stable performance;
★ The sample table can be raised and lowered to adjust the source-substrate distance, effectively saving valuable materials and reducing experimental costs
★ Front and back door to ensure sealing, front sliding door operation light, pneumatic automatic lock; When the rear door is loaded/repaired, the atmosphere will not enter the glove box environment. When the rear door is closed, it can be tightly sealed by the handle lock directly.
★ The equipment adopts anti-turbulence design to prevent dust and improve the quality of film layer.
★ Temperature-controlled organic evaporation source adopts
temperature-controlled beam source furnace structure baffle integrated design to ensure that organic materials are not polluted, not only the Angle is adjustable, the uniformity is good, but also through the imported film thickness instrument linkage control to achieve accurate rate control, doping and so on;
★ The equipment is compatible with organic/inorganic evaporation, multi-component co-evaporation composite film/sub-evaporation to obtain multi-layer film
★ The collocation and number of evaporation source can be selected according to the user's time needs, stable performance;
★ The sample table can be raised and lowered to adjust the source-substrate distance, effectively saving valuable materials and reducing experimental costs.
Typical Technical Specifications Metal-organic evaporation coating with Glovebox PD-400S
Vacuum chamber | 400 x 400 x H460mm; Stainless steel square box-type front and rear door opening structure;Can be used independently, or can be docking with the glove box according to customer requirements. |
Vacuum system | Molecular pump + mechanical pump |
Ultimate vacuum | Better than 10-5Pa |
Restore vacuum time | Reach 9×10-4Pa≤20min |
Metal evaporation source | 2-4 groups of evaporation sources, optional |
Organic evaporation sources | Beam source furnace organic evaporation from controlled temperature 0-700℃ adjustable, integrated baffle adjustable Angle (0-15°), 3-4 groups of evaporation sources, optional; |
Electronic control system | Manual button relay control, perfect logic program interlock protection and abnormal alarm; |
Optional | Cooling circulating water dispenser/film thickness monitor/substrate table heating or water cooling/mask plate mask/ Evaporation power supply/tungsten boat Molybdenum boat |
Power distribution for equipment | Voltage: 380V Power: ≤6.5KW |
Equipment size | Length x width: 1350mm x 900mm |
Model recommendation | All configurations are domestic first-line brands, stable and reliable performance |
Contact Us
| Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
| Organisational Credit Number | VA91420100MA4KN2CF2B |
| Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
| Tel: | 0086 27 81293223 |
| WECHAT/WHATSAPP: | 0086 13129990512 |
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
For Thermal Evaporation Coater,the typical models including:
| MODEL | PD-200 | PD-300 | PD-400 | PD-400S | PD-450S | PD-500S | PD-800S |
| Application | It is widely used in the fields of education and scientific research, including metal electrode layer preparation and new energy material research. The same applies to early experiments in corporate new product development. In scientific research institutes and laboratories, it is often used for evaporation electrodes, scanning electron microscope sample preparation, and research on OLEDs and solar cells. | ||||||
| Materials | Metal and organic thin film materials | Deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, and can expand the deposition of single-layer films, multi-layer films and mixed films. | Can be plated with gold, silver, titanium, chromium, molybdenum SiO2/ITO/AZO/nickel oxide and other materials. | ||||
| Device Size （L×W×H ) | 500×360×420mm | 500×750×1800mm | 850×1500×900mm | 950×780×1900mm | 950×830×1900mm | 1200×950×2000mm | 1850×870×2100mm |
| Chamber Size | Φ260×H310mm Cylindrical | 300×300×400mm | 350× 350×450mm | 400×400×460mm | 450×400×550mm | 500×500×500mm | 800×700×700mm |
| (L×W×H) | |||||||
| Ultimate Vacuum | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 5×10-5Pa | Less than 2×10-5Pa | Less than 2×10-5Pa | Less than 3×10-5Pa | Less than 3×10-5Pa |
| Pumping speed | 5×10-4≤30min | 9×10-4≤40min | 8×10-4≤30min | 5×10-4≤20min | 5×10-4≤20min 12H≤5pa | 5×10-4≤25min 12H≤5pa | 2×10-3≤30min 12H≤5pa |
| Keep pressure | 12H≤10pa | 12H≤10pa | 12H≤10pa | 12H≤5pa | |||
| Unifimity | Film Thickness Unifimity≤ ±5%，Repeatability ≤ ± 5% | ||||||
| Substrate Size | 80mm×80mm | 100mm×100mm | 150mm×150mm | 150mm×150mm | 200mm×200mm | 200mm×200mm | 350mm×350mm |
| Evaporation Sources | 1 or 2-Pocket | 2 or 3-Pocket | 4 or 6-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket | 4 or 8-Pocket |
| System Control | Siemens Touch Screen Automatic PLC control and manual operation;System monitoring,alarm and process menu editing;Process menu can be set accordingly to the preset work step mode;Real time data record;Alarm and safty control | ||||||
The system adopts large pumping speed molecular pump oil free high vacuum system, vacuum mechatronics design, covers a small area (length × width: 550×900 mm) save laboratory space, metal evaporation source and organic evaporation source can be compatible, cost-effective, easy to operate. Widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.
Typical Technical Specifications about PD-400S
Equipment features:
★ Front and back door to ensure sealing, front sliding door operation light, pneumatic automatic lock; When the rear door is loaded/repaired, the atmosphere will not enter the glove box environment. When the rear door is closed, it can be tightly sealed by the handle lock directly.
★ The equipment adopts anti-turbulence design to prevent dust and improve the quality of film layer.
★ Temperature-controlled organic evaporation source adopts
temperature-controlled beam source furnace structure baffle integrated design to ensure that organic materials are not polluted, not only the Angle is adjustable, the uniformity is good, but also through the imported film thickness instrument linkage control to achieve accurate rate control, doping and so on;
★ The equipment is compatible with organic/inorganic evaporation, multi-component co-evaporation composite film/sub-evaporation to obtain multi-layer film
★ The collocation and number of evaporation source can be selected according to the user's time needs, stable performance;
★ The sample table can be raised and lowered to adjust the source-substrate distance, effectively saving valuable materials and reducing experimental costs
★ Front and back door to ensure sealing, front sliding door operation light, pneumatic automatic lock; When the rear door is loaded/repaired, the atmosphere will not enter the glove box environment. When the rear door is closed, it can be tightly sealed by the handle lock directly.
★ The equipment adopts anti-turbulence design to prevent dust and improve the quality of film layer.
★ Temperature-controlled organic evaporation source adopts
temperature-controlled beam source furnace structure baffle integrated design to ensure that organic materials are not polluted, not only the Angle is adjustable, the uniformity is good, but also through the imported film thickness instrument linkage control to achieve accurate rate control, doping and so on;
★ The equipment is compatible with organic/inorganic evaporation, multi-component co-evaporation composite film/sub-evaporation to obtain multi-layer film
★ The collocation and number of evaporation source can be selected according to the user's time needs, stable performance;
★ The sample table can be raised and lowered to adjust the source-substrate distance, effectively saving valuable materials and reducing experimental costs.
Typical Technical Specifications Metal-organic evaporation coating with Glovebox PD-400S
Vacuum chamber | 400 x 400 x H460mm; Stainless steel square box-type front and rear door opening structure;Can be used independently, or can be docking with the glove box according to customer requirements. |
Vacuum system | Molecular pump + mechanical pump |
Ultimate vacuum | Better than 10-5Pa |
Restore vacuum time | Reach 9×10-4Pa≤20min |
Metal evaporation source | 2-4 groups of evaporation sources, optional |
Organic evaporation sources | Beam source furnace organic evaporation from controlled temperature 0-700℃ adjustable, integrated baffle adjustable Angle (0-15°), 3-4 groups of evaporation sources, optional; |
Electronic control system | Manual button relay control, perfect logic program interlock protection and abnormal alarm; |
Optional | Cooling circulating water dispenser/film thickness monitor/substrate table heating or water cooling/mask plate mask/ Evaporation power supply/tungsten boat Molybdenum boat |
Power distribution for equipment | Voltage: 380V Power: ≤6.5KW |
Equipment size | Length x width: 1350mm x 900mm |
Model recommendation | All configurations are domestic first-line brands, stable and reliable performance |
Contact Us
| Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
| Organisational Credit Number | VA91420100MA4KN2CF2B |
| Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
| Tel: | 0086 27 81293223 |
| WECHAT/WHATSAPP: | 0086 13129990512 |
