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Thermal Evaporation Coating Equipment PD-300 for 4inch Substrate

PD-300 widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.
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  • PD-300

  • PUDI

  • 8419899090-1

   Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services. 


For Thermal Evaporation Coater,the typical models including:

MODELPD-200PD-300PD-400PD-400SPD-450SPD-500SPD-800S
Application     It is widely used in the fields of education and scientific research, including metal electrode layer preparation and new energy material research. The same applies to early experiments in corporate new product development. In scientific research institutes and laboratories, it is often used for evaporation electrodes, scanning electron microscope sample preparation, and research on OLEDs and solar cells.
MaterialsMetal and organic thin film materials         Deposit metals (Au, Ag, Al, Ca, Cu, Mg, Fe, Cr, Ni, etc.), non-metals, compounds (MoO3, LiF, etc.) and organic materials, and can expand the deposition of single-layer films, multi-layer films and mixed films.Can be plated with gold, silver, titanium, chromium, molybdenum SiO2/ITO/AZO/nickel oxide and other materials.
Device Size (L×W×H )500×360×420mm500×750×1800mm850×1500×900mm950×780×1900mm950×830×1900mm1200×950×2000mm1850×870×2100mm
Chamber SizeΦ260×H310mm Cylindrical300×300×400mm

350×

350×450mm

400×400×460mm450×400×550mm500×500×500mm800×700×700mm
(L×W×H)
Ultimate VacuumLess than 5×10-5PaLess than 5×10-5PaLess than 5×10-5PaLess than 2×10-5PaLess than 2×10-5PaLess than 3×10-5PaLess than 3×10-5Pa
Pumping speed5×10-4≤30min9×10-4≤40min8×10-4≤30min5×10-4≤20min5×10-4≤20min       12H≤5pa5×10-4≤25min     12H≤5pa2×10-3≤30min       12H≤5pa
Keep pressure12H≤10pa12H≤10pa12H≤10pa12H≤5pa
UnifimityFilm Thickness Unifimity≤ ±5%,Repeatability ≤ ± 5%
Substrate Size80mm×80mm100mm×100mm150mm×150mm150mm×150mm200mm×200mm200mm×200mm350mm×350mm
Evaporation Sources1 or 2-Pocket2 or 3-Pocket4 or 6-Pocket4 or 8-Pocket4 or 8-Pocket4 or 8-Pocket4 or 8-Pocket
System ControlSiemens Touch Screen Automatic PLC control and manual operation;System monitoring,alarm and process menu editing;Process menu can be set accordingly to the preset work step mode;Real time data record;Alarm and safty control

   The system adopts large pumping speed molecular pump oil free high vacuum system, vacuum mechatronics design, covers a small area (length × width: 550×900 mm) save laboratory space, metal evaporation source and organic evaporation source can be compatible, cost-effective, easy to operate. Widely used in research institutes, laboratory evaporation electrode, SEM sample preparation, as well as OLED, solar cell research.


More Infos about PD-300

NamePD-300 High vacuum resistance evaporation coating equipment
Vacuum Chamber300×300×H450 mm
304 stainless steel vacuum chamber, vertical front door opening structure; Lined with antifouling plate.
Vacuum systemMolecular pump + mechanical pump
Ultimate vacuumBetter than 5×10-5 Pa
Restore vacuum timeReach 5×10-4 Pa≤25 min
Metal evaporation source2-3 sets of evaporation sources, optional.
Organic evaporation sourcesBeam source furnace organic evaporation source with controlled temperature 0-500 ℃ adjustable, integrated baffle adjustable Angle (0-15 ° ), 2-3 groups of evaporation sources, optional.
Electric control systemManual logic button control or PLC touch screen control is optional; Perfect logic program interlock protection and abnormal alarm.
OptionalCooling circulating water dispenser/inlet film thickness monitor/substrate table heating or water cooling/Chamber lamp baking/mask plate mask/ Evaporation power supply/tungsten boat Molybdenum boat
Power distribution for equipmentVoltage: AC220 V/50 HZ (380 V optional)
Power: ≤6 KW
Equipment sizeLength x width: 1100 mm x 750 mm x 1500 mm
ManufacturerPUDI VACUUM


Contact Us

Manufacturer Full NameWUHAN PUDI VACUUM TECHNOLOGY CO.,LTD
Organisational Credit NumberVA91420100MA4KN2CF2B
Email:helen@pdvacuum.com ;   zyw@pdvacuum.com
Tel:0086 27 81293223  
WECHAT/WHATSAPP:0086 13129990512


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CONTACT US

Add : #18-1, Donghu High-tech Industrial Innovation Base, No.9, Miaoshan Avenue, Jiangxia District, Wuhan city,China
Phone : +86-131-2999-0512
E-mail :  helen@pdvacuum.com
Skype : etangfei
PUDI VACUUM 

CONTACT US

    Add : #18-1, Donghu High-tech Industrial Innovation Base, No.9, Miaoshan 
    Phone : +86-131-2999-0512
       Wechat/Whatsapp:0086 13129990512
    E-mail : helen@pdvacuum.com
    Skype : etangfei
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