Availability: | |
---|---|
Quantity: | |
PD-600
PUDI VACUUM
8419899090-3
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
PD-600 the electron beam equipment can be used to vaporize oxides or metals with electron gun and steam resistance; It can be used in research institutes and universities to prepare conductive film, optical film, semiconductor film, ferroelectric film and the mass production of enterprises.
More about PUDI VACUUM PD-600
Name | PD-600 Electron Beam evaporation Coater |
Vacuum chamber | Cylindrical vacuum chamber, made of 304 stainless steel, inner diameter 600mm, height 650-800mm, front door, two observation Windows. |
High vacuum pump | Domestic molecular pump or cryogenic pump is optional; |
Ultimate vacuum is better than 5x10-5Pa, pumped from the atmosphere to 8 x10-4Pa≤30 minutes. | |
Electron Gun | 270 degree E-gun |
Porous crucible electron guns, such as 4x25cc, 6x25cc, 8x25cc, or ring crucible (150cc or 300cc), crucible sizes can be customized. | |
10KW or 15KW high voltage power supply with adjustable high voltage output of 6-10KV. | |
Evaporation source | Using resistance heating evaporation; Can be equipped with 2 groups of sources. |
Evaporation rate and film thickness | Inficon SQC-310 quartz crystal film thickness controller to control evaporation rate and film thickness. |
Ion Source | Hall source/RF ion source optional.Used for substrate pre-cleaning and can also be used for ion assisted deposition. |
Intake air control | Flowmeter maximum flow optional, can be configured with multiple air intake. |
Heating control | Quartz lamp sets heat up to 200-300 degrees |
Work holder | Planetary work holder, four 6-8 inch diameter planetary disks, revolution + rotation, adjustable speed. |
Dome type/automatic tilting/plate type work frame is optional | |
Control system | Siemens PLC+ PC automatic control |
Manufacturer | PUDI VACUUM |
Contact US
Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
Organisational Credit Number | VA91420100MA4KN2CF2B |
Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
Tel: | 0086 27 81293223 |
WECHAT/WHATSAPP: | 0086 13129990512 |
Wuhan Pudi Vacuum Technology Co., Ltd is a professional designer and manufacturer of high-quality tailor-made thin film deposition Systems,core team with 22 years of experience in in the fields of machinery, electronics, materials, vacuum, etc. Our research and development team,mainly from academic scientists and qualified engineers,helpfully supports and advises customers in choosing the proper system for their speical needs,equipment installation and training,and steady and fast after-sales services.
PD-600 the electron beam equipment can be used to vaporize oxides or metals with electron gun and steam resistance; It can be used in research institutes and universities to prepare conductive film, optical film, semiconductor film, ferroelectric film and the mass production of enterprises.
More about PUDI VACUUM PD-600
Name | PD-600 Electron Beam evaporation Coater |
Vacuum chamber | Cylindrical vacuum chamber, made of 304 stainless steel, inner diameter 600mm, height 650-800mm, front door, two observation Windows. |
High vacuum pump | Domestic molecular pump or cryogenic pump is optional; |
Ultimate vacuum is better than 5x10-5Pa, pumped from the atmosphere to 8 x10-4Pa≤30 minutes. | |
Electron Gun | 270 degree E-gun |
Porous crucible electron guns, such as 4x25cc, 6x25cc, 8x25cc, or ring crucible (150cc or 300cc), crucible sizes can be customized. | |
10KW or 15KW high voltage power supply with adjustable high voltage output of 6-10KV. | |
Evaporation source | Using resistance heating evaporation; Can be equipped with 2 groups of sources. |
Evaporation rate and film thickness | Inficon SQC-310 quartz crystal film thickness controller to control evaporation rate and film thickness. |
Ion Source | Hall source/RF ion source optional.Used for substrate pre-cleaning and can also be used for ion assisted deposition. |
Intake air control | Flowmeter maximum flow optional, can be configured with multiple air intake. |
Heating control | Quartz lamp sets heat up to 200-300 degrees |
Work holder | Planetary work holder, four 6-8 inch diameter planetary disks, revolution + rotation, adjustable speed. |
Dome type/automatic tilting/plate type work frame is optional | |
Control system | Siemens PLC+ PC automatic control |
Manufacturer | PUDI VACUUM |
Contact US
Manufacturer Full Name | WUHAN PUDI VACUUM TECHNOLOGY CO.,LTD |
Organisational Credit Number | VA91420100MA4KN2CF2B |
Email: | helen@pdvacuum.com ; zyw@pdvacuum.com |
Tel: | 0086 27 81293223 |
WECHAT/WHATSAPP: | 0086 13129990512 |